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An atomic force microscope cantilever with PZT thin film with pyramidal stylus was used for actuation of feedback motion. The maximum stroke of the cantilever was more than 1 μm within a frequency range from direct current up to natural resonant frequency, e.g., 28.48 kHz. An image of a pit of a compact disk with a depth of 100 nm was successfully obtained using only cantilever actuation in a vertical direction. © 1996 American Institute of Physics.