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Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern

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2 Author(s)
Fujii, Toru ; Opto‐electronic Material Laboratory, Nikon Corporation, 1‐10‐1 Asamizodai, Sagamihara, Kanagawa 228, Japan ; Watanabe, Shunji

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An atomic force microscope cantilever with PZT thin film with pyramidal stylus was used for actuation of feedback motion. The maximum stroke of the cantilever was more than 1 μm within a frequency range from direct current up to natural resonant frequency, e.g., 28.48 kHz. An image of a pit of a compact disk with a depth of 100 nm was successfully obtained using only cantilever actuation in a vertical direction. © 1996 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:68 ,  Issue: 4 )

Date of Publication:

Jan 1996

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