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Improved atomic force microscopy imaging using carbon‐coated probe tips

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2 Author(s)
Doris, Bruce B. ; Advanced Products Research and Development Laboratory, Motorola, 3501 Ed Bluestein Boulevard, Austin, Texas 78721 ; Hegde, Rama I.

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Atomic force microscopy (AFM) images using carbon‐coated probe tips are presented for hydrogen‐passivated Si and SiO2 surfaces. Tapping mode measurements on these surfaces demonstrate that the image quality and probe tip wear characteristics are dramatically improved for scans performed with the carbon coated tips. The reasons for the improved quality of AFM imaging and reduced tip damage are discussed. © 1995 American Institute of Physics.

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Applied Physics Letters  (Volume:67 ,  Issue: 25 )