Cart (Loading....) | Create Account
Close category search window
 

Real-time optical thermometry during semiconductor processing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Herman, Irving P. ; Dept. of Appl. Phys., Columbia Univ., New York, NY, USA

The optical techniques used to monitor the temperature of wafers during semiconductor processing are surveyed. The physical principles underlying each method are described. Applications of each optical diagnostic are presented, along with the strengths and weaknesses of the probe. Most of these optical diagnostics have been implemented in research reactors to monitor wafer temperature during one or several types of thin-film processing, such as molecular beam epitaxy, rapid thermal processing, and plasma etching. Pyrometry is the workhorse of noninvasive optical probes of temperature, although it needs supporting models and optical measurements to improve accuracy. Other optical thermometric wafer diagnostics are very promising and are being developed intensively, particularly reflection interferometry, transmission spectroscopy, and various interferometry methods that directly measure the thermal expansion of the wafer

Published in:

Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:1 ,  Issue: 4 )

Date of Publication:

Dec 1995

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.