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Without buffer layers, a lightly boron‐doped epitaxial layer of good crystalline quality has been directly grown on a heavily boron‐doped silicon layer by eliminating misfit dislocations in the heavily boron‐doped layer. X‐ray diffraction analysis revealed that the epitaxial silicon has good crystallinity, similar to that grown on lightly doped silicon substrate. The leakage current of an n+/p diode fabricated in the epitaxial silicon has been measured to be 0.6 nA/cm2 at 5 V. © 1994 American Institute of Physics.