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Diamond(001) single‐domain 2×1 surface grown by chemical vapor deposition

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5 Author(s)
Tsuno, Takashi ; Itami Laboratory, Research Institute of Innovative Technology for the Earth (Itami Research Laboratories, Sumitomo Electric Industries Ltd.), 1‐1‐1 Koyakita, Itami, Hyogo 664, Japan ; Tomikawa, Tadashi ; Shikata, S.-i. ; Imai, Takahiro
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Diamond homoepitaxial films were grown on an off‐angle (001) substrate with a misorientation of 4.3° toward the [110] direction by microwave plasma‐assisted chemical vapor deposition from a methane‐hydrogen gas mixture. The single domain 2×1 surface was observed by low‐energy electron diffraction (LEED) and scanning tunneling microscopy, after growth with methane concentration of 2%. With a methane concentration of 6%, the LEED superstructure spot intensity from another domain increased, suggesting a higher rate of two‐dimensional nucleation.  

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Applied Physics Letters  (Volume:64 ,  Issue: 5 )