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Hydrogen sulfide sensor based on tin oxide deposited by spray pyrolysis and microwave plasma chemical vapor deposition

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3 Author(s)
Manorama, Sunkara ; Materials Science Group, Physical and Inorganic Chemistry Division, Indian Institute of Chemical Technology, Hyderabad‐500 007, India ; Devi, G.Sarala ; Rao, V.J.

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Spray pyrolysis and microwave plasma chemical vapor deposition techniques have been employed successfully for the deposition of CuO impregnated SnO2 films suitable for sensing hydrogen sulfide and methyl mercaptan. The observed change in conductivity of these films upon exposure to H2S gas in air has been explained on the basis of the band theory of solids.

Published in:

Applied Physics Letters  (Volume:64 ,  Issue: 23 )

Date of Publication:

Jun 1994

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