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Dynamic mode force microscopy for the detection of lateral and vertical electrostatic forces

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4 Author(s)
Watanabe, S. ; Department of Electronic‐Mechanical Engineering, Nagoya University, Nagoya 464‐01, Japan ; Hane, K. ; Ito, M. ; Goto, T.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.110437 

In this letter, a variant of scanning force microscope for detecting attractive forces is reported. The force gradients of the attractive forces acting in two orthogonal directions were detected simultaneously from the resonant frequency shifts of a cantilever oscillating in two directions. Using the fine electrode sample, the distributions of the electrostatic forces acting in lateral and vertical directions were visualized separately.

Published in:
Applied Physics Letters  (Volume:63 ,  Issue: 18 )

Date of Publication: Nov 1993

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