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In this letter, a variant of scanning force microscope for detecting attractive forces is reported. The force gradients of the attractive forces acting in two orthogonal directions were detected simultaneously from the resonant frequency shifts of a cantilever oscillating in two directions. Using the fine electrode sample, the distributions of the electrostatic forces acting in lateral and vertical directions were visualized separately.
Published in:
Applied Physics Letters
(Volume:63
,
Issue:
18
)
Date of Publication: Nov 1993