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Correlation between silicon hydride species and the photoluminescence intensity of porous silicon

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11 Author(s)
Tsai, C. ; Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712 ; Li, K.‐H. ; Kinosky, D.S. ; Qian, R.‐Z.
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The role of silicon hydride species in the photoluminescence intensity behavior of porous Si has been studied. The surfaces of luminescent porous Si samples were converted to a predominate SiH termination using a remote H plasma. The as‐passivated samples were then immersed in various concentrations of hydrofluouric solutions to regulate the recovery of SiH2 termination on the surface. Photoluminescence measurements and transmission Fourier‐transform infrared spectroscopy have shown that predominant silicon monohydride (SiH) termination results in weak photoluminescence. In contrast, it has been observed that the appearance of silicon dihydride (SiH2) coincides with an increase in the photoluminescence intensity.

Published in:

Applied Physics Letters  (Volume:60 ,  Issue: 14 )

Date of Publication:

Apr 1992

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