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Laser‐induced fluorescence of oxygen atoms in a plasma reactor

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2 Author(s)
Hancock, G. ; Physical Chemistry Laboratory, South Parks Road, Oxford OX1 3QZ, United Kingdom ; Toogood, M.J.

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Two‐photon laser‐induced fluorescence (LIF) of ground‐state oxygen atoms following excitation of the 2p3 3p13P–2p43P transition has been investigated in a rf parallel‐plate plasma reactor. Stimulated emission on the 2p3 3p13P–2p3 3s13S transition is readily detected, and leads to marked nonlinearities in the LIF signal as a function of O‐atom concentration. Absolute concentrations have been determined as a function of gas composition in CF4/O2 mixtures, and shown to depend on the measured wall loss rates. The method is used to indicate limitations in the use of optical emission as a diagnostic for O atoms.

Published in:

Applied Physics Letters  (Volume:60 ,  Issue: 1 )