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Toward the formation of three-dimensional nanostructures by electrochemical etching of silicon

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3 Author(s)
Kleimann, P. ; LENAC, Université Claude Bernard Lyon-I, 43 bd. du 11 Nov. 1918, 69622 Villeurbanne, France ; Badel, X. ; Linnros, J.

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We report a simple technique to form various kinds of three-dimensional structures in silicon. The process flow is only composed of two steps: lithography and electrochemical etching (“LEE”). The LEE process is an easy and low-cost solution for the fabrication of high-aspect-ratio structures such as walls, tubes, and pillars. Here we demonstrate the possibility to apply the LEE process on the submicrometer scale, indicating that it is a promising tool for silicon nanomachining.

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Applied Physics Letters  (Volume:86 ,  Issue: 18 )