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Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon

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5 Author(s)
Huang, S.M. ; Nanotech Center, East China Normal University, North Zhongshan Rd. 3663, Shanghai 200062, People’s Republic of China ; Sun, Z. ; Lukyanchuk, B.S. ; Hong, M.H.
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Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.

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Applied Physics Letters  (Volume:86 ,  Issue: 16 )