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Lateral-field-excited thin-film Lamb wave resonator

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3 Author(s)
Bjurstrom, J. ; Department of Solid State Electronics, Angstrom Laboratory, Uppsala University, Box 534, S-75121 Uppsala, Sweden ; Katardjiev, I. ; Yantchev, V.

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The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves.

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Applied Physics Letters  (Volume:86 ,  Issue: 15 )