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Effects of ferroelectric fatigue on the piezoelectric properties (d33) of tetragonal lead zirconate titanate thin films

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6 Author(s)
Gerber, P. ; Institute of Materials in Electrical Engineering and Information Technology 2(IWE2), Aachen University, D-52074 Aachen, Germany ; Kugeler, C. ; Ellerkmann, U. ; Schorn, P.
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The fatigue of the electromechanical properties of tetragonal PbZrx, Ti1-xO3 thin films is investigated. The decrease of electromechanical small-signal response is compared to the fatigue of the electric properties and examined in detail. Property fatigue is attributed mainly to switching-failure of the unit cells.

Published in:

Applied Physics Letters  (Volume:86 ,  Issue: 11 )

Date of Publication:

Mar 2005

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