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Arrays of lead lanthanum zirconate titanate pillars were fabricated on niobium-doped (001) strontium titanate substrates using a chemical solution deposition method with resist molds. Periodic arrays of submicron ferroelectric pillars with high crystallinity are required to produce high-quality tunable photonic-crystal devices. The relationship between the crystallinity and width of the pillars was investigated. The highest crystallinity was obtained at a width of
Published in:
Applied Physics Letters
(Volume:85
,
Issue:
13
)
Date of Publication: Sep 2004