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Resonant-cavity-enhanced subwavelength metal–semiconductor–metal photodetector

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3 Author(s)
Collin, Stephane ; Laboratoire de Photonique et de Nanostructures (LPN-CNRS), Route de Nozay, 91460 Marcoussis, France ; Pardo, Fabrice ; Pelouard, Jean-Luc

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1604942 

We propose a resonant-cavity-enhanced subwavelength metal–semiconductor–metal structure for efficient and ultrafast photodetection. A Fabry–Pérot cavity is composed by a bottom multilayer Bragg reflector and a top subwavelength metallic grating. The structure was fabricated on a GaAs substrate with 75 nm finger width and finger spacing, and theoretical results were validated experimentally by reflection spectra and photocurrent measurements. 75% efficiency is predicted theoretically in a 40-nm-thick GaAs layer, leading to potential cutoff frequencies between 300 and 500 GHz in TE polarization. © 2003 American Institute of Physics.

Published in:
Applied Physics Letters  (Volume:83 ,  Issue: 8 )

Date of Publication: Aug 2003

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