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Cantilevers covered with hydrocarbon (CH) and fluorocarbon (CF) monolayers via SiC covalent bonds were prepared and used for adhesion force measurements and friction force microscopy of the surface patterned also with CH and CF areas. The adhesion and friction forces on CF areas were larger than those on CH areas, especially using CF cantilevers. Large polarizabilities of CF molecules compared to CH molecules are found to enhance the contrast in adhesion and friction images. The cantilevers covered with organic monolayers via covalent bonds are useful for chemical force microscopy with contact and noncontact mode atomic force microscopy in various atmospheres since the interface between molecules and cantilevers is thermally and chemically stable. © 2003 American Institute of Physics.