Crystalline titanium nanodots have been formed in the subsurface layer of single-crystal SiO2, i.e., a Ti-based metal quantum dot composite, by subplantation of 9 keV Ti+ ions. Transmission electron microscopy images show that the Ti nanodots have a single, uniform size distribution of ∼3–4 nm, they are single crystals of mainly the Ti bcc β-phase, and their position in the subsurface is controllable through the ion energy. The unique features of subplantation for promoting the precipitation/clustering of crystalline Ti nanodots are discussed. These results confirm previous findings based on the linear optical properties of Ti in SiO2. © 2003 American Institute of Physics.
Published in:
Applied Physics Letters
(Volume:83
,
Issue:
17
)
Date of Publication:
Oct 2003
- Page(s):
-
3590
-
3592
- ISSN :
-
0003-6951
- Digital Object Identifier :
-
10.1063/1.1622784
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Oct 2003