Cart (Loading....) | Create Account
Close category search window

Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Xinxin Li ; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, CAS, Shanghai 200050, Chinaand Venture Business Laboratory, Tohoku University, Sendai 9808579, Japan ; Ono, T. ; Yuelin Wang ; Esashi, M.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

Ultrathin resonant cantilevers are promising for ultrasensitive detection. A technique is developed for high-yield fabrication of single-crystalline-silicon cantilevers as thin as 12 nm. The formed cantilever resonators are characterized by resonance testing in high vacuum. Significant specimen size effect on Young’s modulus of ultrathin (12–170 nm) silicon is detected. The Young’s modulus decreases monotonously as the cantilevers become thinner. The size effect is consistent with the published simulation results of direct-atomistic model, in which surface effects are taken into consideration. © 2003 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:83 ,  Issue: 15 )

Date of Publication:

Oct 2003

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.