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Characterization of the nanostructures of a lithographically patterned dot array by x-ray pseudo-Kossel lines

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8 Author(s)
Lee, D.R. ; Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439 ; Chu, Y.S. ; Choi, Y. ; Lang, J.C.
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Grazing x-ray scattering from a nanofabricated periodic dot array exhibits an interesting diffraction pattern, resembling x-ray Kossel lines, due to the anisotropic x-ray resolution function. We demonstrate that the unique diffraction pattern can be used for precise characterization of the deep nanostructures, which cannot be obtained accurately by microscopy techniques. © 2003 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:82 ,  Issue: 6 )