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Single-step fabrication of silicon-cone arrays

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5 Author(s)
Wysocki, G. ; Angewandte Physik, Johannes-Kepler-Universität, Altenbergerstrasse 69, A-4040, Linz, Austria ; Denk, R. ; Piglmayer, K. ; Arnold, N.
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A regular lattice of SiO2 microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones on a (100) Si surface. The experiments were performed with single-pulse 248 nm KrF laser radiation. © 2003 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:82 ,  Issue: 5 )

Date of Publication:

Feb 2003

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