We have studied the effect of deposition rate and layer thickness on the properties of epitaxial MgB2 thin films grown by hybrid physical-chemical vapor deposition on 4H-SiC substrates. The MgB2 film deposition rate depends linearly on the concentration of B2H6 in the inlet gas mixture. We found that the superconducting and normal-state properties of the MgB2 films are determined by the film thickness, not by the deposition rate. When the film thickness was increased, the transition temperature Tc increased and the residual resistivity ρ0 decreased. Above 3000 Å, a Tc of 41.8 K, a ρ0 of 0.28 μΩ cm, and a residual resistance ratio RRR of over 30 were obtained. © 2003 American Institute of Physics.