The origin of the superstructure observed in epitaxial yttrium oxide (Y2O3) layers on Si (001) is determined by electron energy loss spectroscopy (EELS). The oxygen K edge is measured both in the superstructure and a defect-free region of the Y2O3 layers and they are compared to EELS spectra obtained from bulk stoichiometric and reduced Y2O3. It is shown that as a result of the epitaxial growth, oxygen vacancies order into a superstructure creating nonstoichiometric regions in an otherwise stoichiometric Y2O3 layer. Furthermore, it is shown that oxygen deficiency introduces a change of the density of states of the lower conduction band of Y2O3. © 2003 American Institute of Physics.
Published in:
Applied Physics Letters
(Volume:82
,
Issue:
23
)
Date of Publication:
Jun 2003
- Page(s):
-
4053
-
4055
- ISSN :
-
0003-6951
- Digital Object Identifier :
-
10.1063/1.1581985
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Jun 2003