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Browse Journals & Magazines > Applied Physics Letters ...> Volume:82 Issue:2 Help

Surface acoustic wave applications of lithium niobate thin films

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5 Author(s)
Lee, T.-C. ; Department of Chemical Engineering, Rice University, Houston, Texas 77005 ; Lee, J.-T. ; Robert, M.A. ; Wang, S.
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Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1534413 

A technique combining metalorganic decomposition and rf sputtering is used to grow lithium niobate (LiNbO3) thin films on diamond/silicon substrates, and surface acoustic wave (SAW) filters are fabricated by depositing interdigital transducers onto the multilayer LiNbO3/diamond/silicon structures. Microwave characterization is achieved by using a network analyzer. Evidence is found for SAW propagation in these structures. These experimental findings agree with theoretical predictions. © 2003 American Institute of Physics.

Published in:
Applied Physics Letters  (Volume:82 ,  Issue: 2 )

Date of Publication: Jan 2003

Page(s):
191 - 193
ISSN :
0003-6951
Digital Object Identifier :
10.1063/1.1534413
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Jan 2003

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