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Realization of hollow SiO2 micronozzles for electrical measurements on living cells

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4 Author(s)
Lehnert, T. ; Swiss Federal Institute of Technology Lausanne, Institute of Microelectronics and Microsystems, CH-1015 Lausanne, Switzerland ; Gijs, M.A.M. ; Netzer, R. ; Bischoff, U.

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We present a microfluidic device for the immobilization and electrical measurements, such as patch-clamp or impedance measurements, on individual living cells. Micron-sized hollow SiO2 nozzles are realized in Si wafers using a deep plasma etching process. The micronozzles are integrated with glass wafers containing microfluidic channels and Ag/AgCl electrodes. Reliable cell positioning on the nozzles via hydrodynamic forces is obtained. Relevant electrical parameters of the system, especially seal resistances between attached cells and the nozzle, are determined. © 2002 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:81 ,  Issue: 26 )