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Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques

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5 Author(s)
Lugstein, A. ; Solid State Electronics Institute, Vienna University of Technology Floragasse 7, A-1040 Vienna, Austria ; Bertagnolli, E. ; Kranz, C. ; Kueng, A.
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This paper concerns a scanning probe capable of simultaneously measuring topography and local electrochemistry at a sample surface. Our approach ensures the distance regulation of the electrode by maintaining a fixed working distance between the probe and the sample surface independent from the electrochemical response. This is achieved by integrating micro- and nanoelectrodes into atomic force microscopy tips using focused ion beam techniques. The feasibility and functionality of the fully featured tip is demonstrated by a simultaneous topographical and electrochemical measurement of a porous polymer membrane as model surface. © 2002 American Institute of Physics.  

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Applied Physics Letters  (Volume:81 ,  Issue: 2 )