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Submicron extreme ultraviolet imaging using high-harmonic radiation

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6 Author(s)
Wieland, M. ; RheinAhrCampus, University of Applied Sciences, Suedallee 2, 53424 Remagen, Germany ; Frueke, Rolf ; Wilhein, Thomas ; Spielmann, Christian
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We report on experiments using high-harmonic (HH) radiation for microscopy imaging at 13 nm wavelength. A simple setup using a zone plate as objective and a back-illuminated CCD as detector yields at moderate magnifications of M≈60 a spatial resolution of δx≪0.8 μm demonstrated with a sample of mica. The HH radiation was monochromatized by means of a high-efficiency multilayer monochromator consisting of two Mo/Si-mirros. © 2002 American Institute of Physics.

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Applied Physics Letters  (Volume:81 ,  Issue: 14 )