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High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride–trifluoroethylene) copolymer

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3 Author(s)
Xu, T.-B. ; Materials Research Institute and Electrical Engineering Department, The Pennsylvania State University, University Park, Pennsylvania 16802 ; Cheng, Z.-Y. ; Zhang, Q.M.

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We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride–trifluoroethylene) [P(VDF–TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1 J/cm3) of the active polymer [the electrostrictive P(VDF–TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (≫100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters. © 2002 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:80 ,  Issue: 6 )

Date of Publication:

Feb 2002

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