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Nanometer-sized optical waveguides fabricated by anodic oxidation using a scanning near-field optical microscope

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5 Author(s)
Onuki, T. ; Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan ; Tokizaki, T. ; Watanabe, Y. ; Tsuchiya, T.
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We have fabricated an optical waveguide with a subwavelength cross section that propagates light. A metal–oxide core is partially embedded into a metal clad by anodic oxidation using the probe tip of a scanning near-field optical microscope (SNOM). Then, using the SNOM in transmission mode we have evidence of light propagating more than 5 μm in the waveguide whose core width and thickness are 300 and 70 nm, respectively. © 2002 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:80 ,  Issue: 24 )