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Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy

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5 Author(s)
Yenilmez, Erhan ; Department of Chemistry, Stanford University, Stanford, California 94305 ; Wang, Qian ; Chen, Robert J. ; Wang, Dunwei
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A methodology is developed to enable wafer scale fabrication of single-walled carbon nanotube (SWNT) tips for atomic force microscopy. Catalyst selectively placed onto 375 prefabricated Si tips on a wafer is made possible by a simple patterning technique. Chemical vapor deposition on the wafer scale leads to the growth of SWNTs protruding from more than 90% of the Si tips. This represents an important step towards the scale up of nanotube probe tips for advanced nanoscale imaging of solid-state and soft biological systems and for scanning probe lithography. © 2002 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:80 ,  Issue: 12 )