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Laser energy deposition at sapphire surfaces studied by pulsed photothermal deformation

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3 Author(s)
Dreyfus, R.W. ; IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598 ; McDonald, F.A. ; von Gutfeld, R.J.

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A surface deformation technique measures the energy deposited in sapphire surfaces irradiated by focused excimer laser light. The absorbed energy creates ≲3 electron‐hole pairs/oxygen atom, consistent with a photochemical etching mechanism.

Published in:

Applied Physics Letters  (Volume:50 ,  Issue: 21 )

Date of Publication:

May 1987

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