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Electrical characteristics of Schottky diodes fabricated using plasma assisted chemical vapor deposited diamond films

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6 Author(s)
Gildenblat, G.Sh. ; The Pennsylvania State University, University Park, Pennsylvania 16802 ; Grot, S.A. ; Wronski, C.R. ; Badzian, A.R.
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Schottky diodes were fabricated using gold and aluminum contacts to thin diamond films obtained by a microwave plasma assisted chemical vapor deposition process. The current‐voltage and capacitance‐voltage‐frequency characteristics of these devices are similar to those fabricated on a crystalline diamond base formed by traditional ultrahigh pressure process.

Published in:
Applied Physics Letters  (Volume:53 ,  Issue: 7 )

Date of Publication: Aug 1988

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