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Schottky diodes were fabricated using gold and aluminum contacts to thin diamond films obtained by a microwave plasma assisted chemical vapor deposition process. The current‐voltage and capacitance‐voltage‐frequency characteristics of these devices are similar to those fabricated on a crystalline diamond base formed by traditional ultrahigh pressure process.
Published in:
Applied Physics Letters
(Volume:53
,
Issue:
7
)
Date of Publication: Aug 1988