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Projection printing of gold micropatterns by photochemical decomposition

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3 Author(s)
Baum, Thomas H. ; IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120‐6099 ; Marinero, E.E. ; Jones, Carol R.

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Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single‐step, dry process for selectively producing metal patterns is highlighted.

Published in:

Applied Physics Letters  (Volume:49 ,  Issue: 18 )