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Observations of argon emission lines used for fluorine atom actinometry in low power rf discharges

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1 Author(s)
Savas, S.E. ; IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120‐6099

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Anomalous power and frequency dependences of some argon emission lines are observed in a low power rf discharge in a 2% admixture of argon in CF4. Frequency ranges from 0.12 to 13.56 MHz for pressures of 25 and 50 mTorr and 20 W power to the plasma. Power and frequency dependences of the 7504 Å line differ from those for the 6416 Å, 6871 Å, and 7126 Å lines. These differences and argon excitation cross sections are used to examine the validity of actinometry assumptions. The 6871 Å or 6416 Å lines work better under these conditions as actinometer references, while the 7504 Å seems preferable for etch plasmas.

Published in:

Applied Physics Letters  (Volume:48 ,  Issue: 16 )