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New piezoelectric Ta2O5 thin films

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2 Author(s)
Nakagawa, Y. ; Faculty of Engineering, Yamanashi University, Takeda‐4, Kofu 400, Japan ; Gomi, Yasuo

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Crystallized Ta2O5 thin films have been deposited on fused quartz substrates by reactive dc diode sputtering. Crystalline structures and piezoelectric properties of the films were investigated. The electromechanical coupling coefficient K2 of the surface acoustic waves was 0.5% for hk=1.0. This value is comparable to that for ZnO thin films.

Published in:

Applied Physics Letters  (Volume:46 ,  Issue: 2 )

Date of Publication:

Jan 1985

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