Cart (Loading....) | Create Account
Close category search window
 

New piezoelectric Ta2O5 thin films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Nakagawa, Y. ; Faculty of Engineering, Yamanashi University, Takeda‐4, Kofu 400, Japan ; Gomi, Yasuo

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.95712 

Crystallized Ta2O5 thin films have been deposited on fused quartz substrates by reactive dc diode sputtering. Crystalline structures and piezoelectric properties of the films were investigated. The electromechanical coupling coefficient K2 of the surface acoustic waves was 0.5% for hk=1.0. This value is comparable to that for ZnO thin films.

Published in:

Applied Physics Letters  (Volume:46 ,  Issue: 2 )

Date of Publication:

Jan 1985

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.