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High coupling and high velocity surface acoustic waves using a c‐axis oriented ZnO film on translucent Al2O3 ceramics

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3 Author(s)
Takeda, Fumio ; Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto 606, Japan ; Shiosaki, T. ; Kawabata, Akira

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The layered structure comprising a c‐axis normally oriented ZnO piezoelectric film and a translucent Al2O3 ceramic substrate which has a high surface‐acoustic‐wave velocity and a small surface roughness has given both a high phase velocity Vp and a high coupling k2 for the 0th (Rayleigh) mode, 1st (Sezawa) mode, and leaky mode surface acoustic waves. The measured maximum values of k2 are 3.6% for the 0th mode at h/λ=0.45 where Vp is 3.2 km/s, 5.7% for the 1st mode at h/λ=0.21 where Vp is 5.6 km/s, and 6.7% for the leaky mode at h/λ=0.16 where Vp is 6.2 km/s, where the interdigital transducers are located at the interface in measuring the above values, and also electrically floating plane metals are on top of the ZnO film for the last two values.

Published in:

Applied Physics Letters  (Volume:43 ,  Issue: 1 )

Date of Publication:

Jul 1983

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