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Polycrystallization of pulsed laser deposited BaTiO3 thin films at room temperature by KrF laser annealing

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4 Author(s)
Tomita, Hiroyuki ; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan ; Ninomiya, Yutaka ; Ito, Atsushi ; Obara, Minoru

It is necessary to establish the fabrication techniques of high quality BaTiO3 thin films. In the present work, the laser annealing technique was applied to crystallize amorphous BaTiO3 thin films deposited by KrTiO3 laser ablation at room temperature, and the effect of pulsed excimer laser annealing on BaTiO 3 thin films was investigated for the first time

Published in:

Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE  (Volume:1 )

Date of Conference:

30-31 Oct 1995

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