Polycrystallization of pulsed laser deposited BaTiO/sub 3/ thin films at room temperature by KrF laser annealing

It is necessary to establish the fabrication techniques of high quality BaTiO/sub 3/ thin films. In the present work, the laser annealing technique was applied to crystallize amorphous BaTiO/sub 3/ thin films deposited by KrTiO/sub 3/ laser ablation at room temperature, and the effect of pulsed excimer laser annealing on BaTiO/sub 3/ thin films was investigated for the first time.