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Elastic surface wave devices based on piezoelectric thick-films

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3 Author(s)
G. de Cicco ; Dipartimento di Fisica, Modena Univ., Italy ; B. Morten ; M. Prudenziati

A study has been performed for the development of elastic-waves structures, involving screen printed and fired piezoelectric layers on nonpiezoelectric substrates, intended for new families of thick film sensors. This study approached the electroacoustic effects, i.e., the coupling between electromechanical parameters of the layers and elastic properties of the substrate, related to the wave propagation. In this work, particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and antisymmetric) Lamb's waves are generated. The realization processes and the performance characteristics of these structures are presented.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:43 ,  Issue: 1 )