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Equipment management system (EMS)

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2 Author(s)
Yurtsever, T. ; Motorola Inc., Austin, TX, USA ; Comerford, M.

Equipment Management System (EMS) is a software tool used to monitor and track equipment states, restrictions and PM schedules in real time. EMS has been designed and customized to support the MOS-2 die production facility. The system provides graphical representation of the entire factory. Color coded icons represent equipment's current state (i.e. qualification, production, unscheduled maintenance, etc.). Preventative maintenance schedules and restrictions are indicated using different patterns. Users can Click on these icons and use pull down menus to change, modify and display current or historical information. The purpose of the system is to collect variable equipment data to facilitate equipment utilization improvement and to increase the visibility of the production areas In this paper, we discuss the system description, implementation and training process, impact of EMS on manufacturing and benefits of the systems.

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995

Date of Conference:

13-15 Nov 1995

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