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Silicon-on-Insulator (SOI) Ring Resonator-Based Integrated Optical Hydrogen Sensor

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7 Author(s)
N. A. Yebo ; Dept. of Inf. Technol., Ghent Univ., Ghent ; D. Taillaert ; J. Roels ; D. Lahem
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We demonstrate a novel, highly sensitive integrated hydrogen sensor based on a silicon ring resonator on the silicon-on-insulator platform. The hydrogen sensitive element in the sensor structure is a platinum-doped tungsten oxide catalytic coating. The catalytic combustion of hydrogen in air leads to a local temperature rise in the ring resonator. The resulting thermo-optic effect shifts the ring resonator resonance. Resonance wavelength shifts higher than a nanometer are measured for hydrogen concentrations below the 4% lower explosion limit. A potentially tunable sensitivity of around 480 pm shift per %H2 is achieved at an operating temperature of about 40degC.

Published in:

IEEE Photonics Technology Letters  (Volume:21 ,  Issue: 14 )