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High velocity shear horizontal surface acoustic wave modes of interdigital transducer/(100) AlN/(111) diamond

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4 Author(s)
Sean Wu ; Department of Electronics Engineering and Computer Sciences, Tung-Fang Institute of Technology, 110 Tung-Fung Road, Hunei Shiang, Kaohsiung 829, Taiwan ; Ruyen Ro ; Zhi-Xun Lin ; Maw-Shung Lee

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In this research, shear horizontal (SH) surface acoustic wave (SAW) modes of interdigital transducer (IDT)/(100) AlN/(111) diamond propagated along the y-axis were theoretically analyzed and they exhibited excellent SH SAW properties. This is special for mode 0 where the K2 curve shows a maximum value (1.27%) at h/λ=0.28 and the velocity is 7496 m/s. The research results provide a predictable and theoretical basis for further application on high velocity SH SAW devices.

Published in:

Applied Physics Letters  (Volume:94 ,  Issue: 9 )