We demonstrate the rectification of force spectroscopy in noncontact atomic force microscopy. The resonant frequency shift (Δf) in the probe oscillation and distance-modulated capacitance (dC/dZ) are simultaneously measured on thin dielectric films as a function of externally applied bias voltage and tip-sample distance Z. Analysis of dC/dZ spectroscopy has revealed that the probe-tip position shifts due to the attractive force acting between the tip and a sample. We show that the shifted Δf-Z curve can be rectified and the deformation of the probe tip can be quantitatively assessed.
Published in:
Applied Physics Letters
(Volume:94
,
Issue:
8
)
Date of Publication:
Feb 2009
- Page(s):
-
083104
-
083104-3
- ISSN :
-
0003-6951
- Digital Object Identifier :
-
10.1063/1.3086899
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Feb 2009