By Topic

Thin-film characterization by terahertz time-domain spectroscopy using grating-assisted excitation of guided modes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Laamiri, Y. ; Laboratoire IMEP-LAHC, UMR CNRS 5130, University of Savoie, 73 376 Le Bourget du Lac, France ; Garet, F. ; Coutaz, J.-L.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

Using a grating coupler, the guided modes of a dielectric slab can be efficiently excited by a terahertz beam delivered by a classical terahertz time-domain setup. By analyzing the variation in the transmission spectrum induced by a thin film deposited over the device, the refractive index as well as the absorption coefficient of the film material can be determined with a great accuracy because of the increased interaction length with the guided terahertz signal. The principle of such a technique is demonstrated in the case of a 7.1 μm thick film of Shipley 1828 photoresist.

Published in:

Applied Physics Letters  (Volume:94 ,  Issue: 7 )