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Electron tunneling in a strained n-type Si1-xGex/Si/Si1-xGex double-barrier structure

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7 Author(s)
Hung, K.M. ; Department of Electronics Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan ; Cheng, T.-H. ; Huang, W.P. ; Wang, K.Y.
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We report electrical measurements on an n-type Si1-xGex/Si/Si1-xGex double-barrier structure grown on a partially relaxed Si1-yGey buffer layer. Resonance tunneling of Δ4 band electrons is demonstrated. This is attributed to the strain splitting in the SiGe buffer layer where the Δ4 band is lowest in energy at the electrode. Since the Δ4 band electrons have a much lighter effective mass along the direction of tunneling current in comparison with that of the Δ2 band electrons, this work presents an advantage over those SiGe resonant-tunneling diodes in which tunneling of Δ2 band electrons is employed.

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Applied Physics Letters  (Volume:93 ,  Issue: 12 )