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Growth of nonpolar (1120) ZnO films on LaAlO3 (001) substrates

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7 Author(s)
Ho, Yen-Teng ; Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 300, Taiwan ; Wang, Wei-Lin ; Peng, Chun-Yen ; Liang, Mei-Hui
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Nonpolar (1120) ZnO films were grown on LaAlO3 (001) single crystal substrates at temperature from 300 to 750 °C by pulsed laser deposition method. The films were examined using x-ray diffraction, reflection high energy electron diffraction, and photoluminescence measurements for the crystallinity. The surface morphology of ZnO films from atomic force microscopy exhibits L-shaped domains. Cross-sectional transmission electron microscopy with selected area diffraction reveals two types of a-plane ZnO domains perpendicular to each other with in-plane orientation relationships of [0001]ZnO||[110]LAO and [1100]ZnO||[110]LAO.

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Applied Physics Letters  (Volume:93 ,  Issue: 12 )