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High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices

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7 Author(s)
Natarajan, S. ; Department of Electrical and Computer Engineering, Duke University, Durham, North Carolina 27708, USA ; Parker, C.B. ; Glass, J.T. ; Piascik, J.R.
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We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 μm thick silicon dioxide layer to the device. The device is fabricated using microelectromechanical systems fabrication principles and utilizes carbon nanotubes as field emitters. A dc amplification factor of 600 was obtained. This is the highest value reported for carbon nanotube-enabled microtriode devices. The high voltage capability of these microscale devices will enable their use in a wider variety of applications.

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Applied Physics Letters  (Volume:92 ,  Issue: 22 )