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High quality mechanical and optical properties of commercial silicon nitride membranes

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7 Author(s)
Zwickl, B.M. ; Department of Physics, Yale University, 217 Prospect Street, New Haven, Connecticut 06511, USA ; Shanks, W.E. ; Jayich, A.M. ; Yang, C.
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We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm thick, 1 mm2 membranes have mechanical Q≫106 at 293 K, and Q≫107 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2×10-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

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Applied Physics Letters  (Volume:92 ,  Issue: 10 )