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Pull-in instability of parallel-plate electrostatic microactuators under a combined variable charge and voltage configuration

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2 Author(s)
Son, C. ; School of Electrical and Computer Engineering, Purdue University, W. Lafayette, Indiana 47907, USA ; Ziaie, B.

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In this letter, we present a theoretical analysis of pull-in instability of parallel-plate electrostatic microactuators under a combined variable charge and voltage configuration. This occurs in parallel plate capacitors partially filled with a charged dielectric (electret) where the plates are connected together through an impedance. Our results demonstrate the possibility of achieving full range motion under certain conditions. For Teflon® electrets much thinner than the air gap; the maximum traveling distance is similar to the voltage controlled electrostatic actuators (gap/3), whereas for electrets four times thicker than the initial gap the maximum traveling distance can approach 100% of the gap.

Published in:

Applied Physics Letters  (Volume:92 ,  Issue: 1 )

Date of Publication:

Jan 2008

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