Cart (Loading....) | Create Account
Close category search window

Mechanical properties of AlxGa1-xN films with high Al composition grown on AlN/sapphire templates

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

11 Author(s)
Xu, F.J. ; State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China ; Shen, B. ; Wang, M.J. ; Xu, J.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link: 

Mechanical properties of AlxGa1-xN thin films with high Al composition (0.33≤x≤1) grown on AlN/sapphire templates have been investigated by means of the nanoindentation technique. It is found that Young’s modulus E of the films increases with increasing Al composition. In addition, it is also found that the occurrence of the clear and sudden displacement discontinuity (“pop-in”) in the plastic deformation (PD) process is dependent on Al composition in AlxGa1-xN films. The higher Al composition results in less occurrence of the pop-in in the PD process of the films. With increasing Al composition, it is believed that the increase of the bond strength and the decrease of the lattice mismatch between AlxGa1-xN films and AlN/sapphire templates result in greater resistance to the formation of dislocations, which is responsible for the pop-in behavior in AlxGa1-xN films.

Published in:

Applied Physics Letters  (Volume:91 ,  Issue: 9 )

Date of Publication:

Aug 2007

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.