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Single-step fabrication of Fresnel microlens array on sapphire substrate of flip-chip gallium nitride light emitting diode by focused ion beam

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2 Author(s)
Ming-Kwei Lee ; Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424 Taiwan, Republic of China ; Kuo, Kwei-Kuan

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A simple one-step focused ion beam milling technique was used to fabricate a Fresnel microlens array on the backside of sapphire substrate of a gallium nitride blue light emitting diode. The optical output power from the flip-chip gallium nitride blue light emitting diode is enhanced to about 1.68 times at the injection current of 20 mA. The spatial light distribution from the backside of flip-chip gallium nitride blue light emitting diode with a Fresnel microlens array shows a uniform and stronger light emission.

Published in:

Applied Physics Letters  (Volume:91 ,  Issue: 5 )