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Feedback control of the growth rate of carbon nanotubes (CNTs) was performed. By measuring the CNTs thickness using an optical microscope and an image processor, and instantaneous calculation of growth rate, continuous data of CNT thickness/growth rate versus growth time curves were obtained. The growth rate for the constant growth condition degraded as time progressed. In contrast, growth rate degradation was suppressed by optimizing the growth conditions by changing the growth parameters such as growth temperature, pressure, and gas flow rate. As a result, a larger thickness was obtained under the varied growth condition in the measurement time range.